The critical pulse acceleration or the critical step acceleration for different angles of decline can be got from the research result s . the edge effects of the comb - capacitors having small angle of decline are researched by using the electronics module of the finite element tool ansys 傳感器所能承受的對應(yīng)不同傾斜角度的最大脈沖加速度或最大階躍加速度可以通過文中建立的分析模型得到,這對梳齒電容式傳感器的設(shè)計(jì)可以提供參考。